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发明名称
DISPOSITIF MICROELECTRONIQUE DOTE DE TRANSISTORS SURMONTES D'UNE COUCHE PIEZOELECTRIQUE
摘要
申请公布号
FR2888990(B1)
申请公布日期
2007.09.07
申请号
FR20050052279
申请日期
2005.07.22
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE ETABLISSEMENT PUBLIC A CARACTERE SCIENTIFIQUE TECHNIQUE ET INDUSTRIEL
发明人
LOLIVIER JEROME;VINET MAUD;POIROUX THIERRY
分类号
H01L29/78;H01L21/336;H01L27/108;H01L41/00
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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