MESO-SCALE PARALLEL-KINEMATICS NANO-POSITIONING XY FLEXURE STAGE

摘要

In one embodiment, a flexure subsystem (26) comprises a base (30), a stage (34), a positioning mechanism (40), and a control device (22). The base (30) and stage (34) have first and second portions that are spaced apart from each other. The positioning mechanism (40) is coupled between the base (30) and the stage (34). The positioning mechanism (40) includes an actuator (42a, 42b) and a flexure structure engaged by the actuator (42a, 42b). The flexure structure includes base links (62) coupled to the first base portion, stage links (64) coupled to the first stage portion, and an intermediate member (58) coupled to both the base and stage links (62, 64). All structures are coupled by flexure hinges (56). The control device (22) generates a control signal to change position of the stage (34) by sending a control signal to the actuator (42a, 42b) which provides a force to elastically deform the flexure structure and correspondingly move the stage (34).