| 摘要 |
<p>An oscillator includes: a glass substrate (21) having fixed electrodes (23a, 23b); a second glass substrate (28) having a coil pattern (30); a silicon substrate (26) arranged between the first and the second glass substrate and having a diaphragm (26a); and a gas pipe (33) capable displacing the diaphragm (26a). With this configuration, the oscillator can exhibit a function as follows. That is, when an inductance L increases, a capacity C also increases, a resonance frequency decreases, and a feedback capacity increases. Accordingly, it is possible to obtain stable oscillation in a large frequency-variable range.</p> |
