LIQUID DELIVERY HEAD, LIQUID DELIVERY APPARATUS, AND LIQUID DELIVERY METHOD

摘要

This invention provides a liquid delivery head, which can continue delivery operation by easily recovering the polarized state of a nozzle plate in a short time, and a liquid delivery apparatus and a liquid delivery method. The liquid delivery head comprises an insulating nozzle plate (6) provided with a nozzle (11) comprising a liquid supply port (12) for supplying a liquid and a delivery port (10) for delivering the liquid to a base material. The liquid delivery head further comprises a cavity (16), which is in communication with the liquid supply port (12) and stores the liquid delivered through the delivery port (10), an electrostatic voltage power supply (15) for applying electrostatic voltage to the nozzle (11) and across the liquid within the cavity (16) and the base material to generate electrostatic suction force, and control means (19) for controlling the electrostatic voltage power supply (15). The nozzle (11) is a flat nozzle. The control means (19) conducts control so that the electrostatic voltage power supply (15) conducts polarization recovery operation in which electrostatic voltage which is opposite in polarity to the electrostatic voltage applied in the liquid delivery, is applied.