| 摘要 |
PROBLEM TO BE SOLVED: To provide a sieve capable of highly accurately sorting fine particles. SOLUTION: The sieve 1 is made of silicon and has a multi-stage structure consisting of the first-stage sieve 10, the second-stage sieve 20 and the third-stage sieve 30 piled and joined together. A bottom section 40 serving as a receiving pan is joined to the bottom of the third-stage sieve 30. Through holes 12, 22 and 32 allowing sorted particles to pass through are formed in the sieves 10, 20 and 30, respectively. The hole diameters of the through holes 12, 22 and 32 are reduced step by step in this order, i.e., the hole diameter of the through hole 32 is smaller than that of the through hole 22, and the hole diameter of the through hole 22 is smaller than that of the through hole 12. COPYRIGHT: (C)2007,JPO&INPIT
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