| 摘要 |
An electrostatic chuck is provided to prevent an absorbed substrate from being influenced by a leakage current by preventing generation of an excessive leakage current. An electrostatic chuck(10) uses Johnsen-Rahbek force, including a dielectric layer(13) and an electrode(12a,12b). The dielectric layer is composed of a ceramics layer(13a) and a resin layer(13b) formed on the ceramics layer. The electrode generates electrostatic absorption force. The dielectric layer can have a protrusion(13c,13e) for supporting a substrate. The resin layer can be formed by fluorine resin. |
