| 摘要 |
<P>PROBLEM TO BE SOLVED: To make compact and simple a rotation mechanism of a plasma generating nozzle for uniformly irradiating a plume over a wide range, as well as, to make the plume generated at the plasma generating nozzle more stable, for a work treatment device giving a work W as an object for treatment of a given treatment by irradiating the plume that is turned into a plasma gas. <P>SOLUTION: The plasma generating nozzle 31 is provided with an inner conductor 32 receiving microwaves and a turned into plasma, gas based on energy received, and a rotating plate 36 fitted to a tip part of the plasma-generating nozzle 31 so as to cover the plume P generated at the internal conductor 32 inside the plasma generating nozzle 31. The rotating plate 36 is provided with a spout tube 38 capable of jetting out the plume P inside the nozzle covered with the rotating plate 36 from inside the nozzle toward the outside, and can rotate on its axis by reaction of the plume P jetted out of the spout tube 38. <P>COPYRIGHT: (C)2007,JPO&INPIT |
