| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater excellent in durability and reliability by preventing the occurrence of cracks on an interface between a wiring conductor and a ceramic base body while relaxing a stress occurring between the ceramic base body and the wiring conductor during a rapid temperature rise or fall such as during baking or during use. SOLUTION: The ceramic heater includes the ceramic base body and the wiring conductor buried in the ceramic base body. A stress relaxing layer covering the surface of the wiring conductor is provided between the ceramic base body and the wiring conductor. COPYRIGHT: (C)2007,JPO&INPIT
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