NITRIDE SEMICONDUCTOR LIGHT EMITTING DEVICE HAVING PYRAMID STRUCTURE AND MANUFACTURING METHOD OF THE SAME

摘要

A nitride semiconductor light emitting device having a pyramid structure and its fabricating method are provided to obtain easily a p-type nitride semiconductor layer having sufficient hall concentration in a light emitting portion of hexagonal pyramid structure. A p-type nitride semiconductor base layer(102) is formed on a substrate(101). A mask layer(103) having an opening is formed on the p-type nitride semiconductor. A light emitting portion(150) of a hexagonal pyramid structure is grown through the opening of the mask layer. The light emitting portion has a p-type nitride semiconductor crystal of hexagonal pyramid, an active layer(105) and an n-type nitride semiconductor layer.