| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem wherein it is difficult to manufacture a thermally stable and extremely fine tunnel junction with improved reproducibility. SOLUTION: Niobium that is a fireproof metal material is deposited to form a fireproof niobium metal electrode, and then a niobium oxide film (Nb<SB>2</SB>O<SB>5</SB>) is formed on a fireproof metal electrode by applying oxygen plasma. Then, a deposition angle is changed, and the niobium metal electrode is formed on the oxide film, thus realizing the oxide film and the extremely fine tunnel junction. COPYRIGHT: (C)2007,JPO&INPIT
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