| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device free from moisture condensation at vacuum piping of an auxiliary exhaust room. SOLUTION: In the inspection device equipped with a sample room 10 and the auxiliary exhaust room, a sample 1 held on a sample holder 2 is arranged inside the auxiliay exhaust room 20 before the auxiliary exhaust room is vacuum piped, an atmospheric side gate valve 22 is closed, an intake valve 28 is opened, and dry nitrogen of 2 to 4 atm. is guided into the auxiliary exhaust room. An atmospheric air opening valve 26 is opened, and air in the auxiliary exhaust room 20 is exhausted to be substituted with dry nitrogen. COPYRIGHT: (C)2007,JPO&INPIT
|
