| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample holding device in which a moving route of a wafer has been secured wide, without interfering with an electrode to alleviate turbulence of an electric field around the wafer, and provide a charged particle beam device. SOLUTION: This sample holding device has a plurality of electrodes and is provided with a moving mechanism for vertically moving a part of the plurality of the electrodes. Moreover, the moving mechanism lowers the part of the plurality of the electrodes so as to be separated from an introduction route of a sample. Furthermore, the sample holding device has a positioning member of the sample, and positioning of the sample is carried out, after the mounting of the sample. COPYRIGHT: (C)2007,JPO&INPIT
|
