发明名称 MANUFACTURING APPARATUS FOR PLASMA DISPLAY PANEL
摘要 A manufacturing apparatus for a plasma display panel is provided to reduce a total process time and a manufacturing cost of the plasma display panel by performing a plasma process for a front substrate including a protective layer. A manufacturing apparatus for a plasma display panel includes a heating unit(200), a protective layer deposition unit(210), and a plasma processing unit(220). The heating unit heats a front substrate including an upper dielectric layer. The protective layer deposition unit forms a protective layer by depositing a protective layer material on the upper dielectric layer of the front substrate heated by the heating unit. The plasma processing unit performs a plasma process for the front substrate having the protective layer before the heat of the front substrate is cooled in the protective layer deposition unit.
申请公布号 KR20070090680(A) 申请公布日期 2007.09.06
申请号 KR20060020668 申请日期 2006.03.03
申请人 LG ELECTRONICS INC. 发明人 BANG, JUNG IL
分类号 H01J11/50;H01J11/20 主分类号 H01J11/50
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