| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve a problem that a module for more improving sensitivity, less reducing power consumption and which is much smaller-sized, is desired in a millimeter wave radar device. <P>SOLUTION: A radar device of the present invention includes: a silicon substrate with circuit elements mounted on its one principal surface; a first dielectric substrate pasted on an area other than the area where the circuit elements are mounted; a second dielectric substrate pasted on another principal surface; a transmission slot antenna including a waveguide area of a void portion formed over the first dielectric substrate, the silicon substrate and the second dielectric substrate; a reception slot antenna array which includes a plurality of waveguide areas by void portions formed over the first dielectric substrate, the silicon substrate and the second dielectric substrate and in which one-side terminals of the plurality of void portions are connected in common; and a fin phase shifter of a micro-electro-mechanical system (MEMS) provided in accordance with each of the void portions in the area of common connection. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
