MICROPUMP, LIQUID FEEDING METHOD AND LIQUID FEEDING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a liquid feeding method and a liquid feeding system capable of increasing liquid feeding speed at a time of liquid feed in a main direction in an embodiment in such a case that liquid to be used for reaction is fed to a downstream in a channel of a micro-reactor, and simultaneously capable of sufficiently preventing formation of bubbles in a pump chamber in a case that liquid is fed in any directions in a micropump capable of feeding liquid in both directions with using change ratio of channel resistance to change of pressure difference. SOLUTION: For an oscillating actuator connected to a pressurizing chamber to which a first channel and a second channel of which change rate of channel resistance to change of pressure difference is smaller than that of the fist channel, voltage rise time T1 of first drive voltage wave form for feeding liquid in a direction toward the second channel from the first channel is set shorter than voltage rise time T7 of a second drive voltage wave form for feeding liquid in a direction toward the first channel from the second channel. COPYRIGHT: (C)2007,JPO&INPIT