CHARGER FOR CHARGING DRY AIR OR NITROGEN GAS INTO SEMICONDUCTOR WAFER CONTAINER, AND WAFER STATIC ELECTRICITY REMOVER USING SAME

摘要

PROBLEM TO BE SOLVED: To remove a chemical gas in a semiconductor wafer container without opening the lid of the container and block production of acids. SOLUTION: A dry air or nitrogen gas charger A is connected tightly to a feed side respiring hole 8a and a discharge side respiring hole 8b among a plurality of respiring holes 8 in a bottom plate 5 of a semiconductor wafer container 1 housing semiconductor wafers 9. The respiring holes 8a, 8b have each a PTFE filter 7. The charger A is composed of a dry air/nitrogen gas feeder 11 for feeding dry air or nitrogen gas into the wafer container 1, and a used dry air/nitrogen discharger 12 for removing a chemical gas as well as water content in the wafer container 1 by the dry air or nitrogen gas fed into the wafer container 1 to block production of acids on the semiconductor wafer surface and thereafter discharging the dry air or nitrogen gas. COPYRIGHT: (C)2007,JPO&INPIT