| 摘要 |
PROBLEM TO BE SOLVED: To provide an imaging optical system that has high resolution between, for example, two points. SOLUTION: The imaging optical system 100 includes: a light source 101 for illuminating an object surface 103; a condenser lens 102; and an objective optical system 104 for imaging the object surface 103 onto an imaging surface 105. An optical modulation element F1 is disposed at least between the light source 101 and condenser lens 102 and the object surface 103 or between the objective optical system Lob and the imaging surface 105. The optical modulation element F1 has the transmittance characteristic in which the transmittance of the central part and that of a peripheral part is different. COPYRIGHT: (C)2007,JPO&INPIT
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