| 摘要 |
A stocker is provided to treat a receiving subject properly by a receiving subject treatment unit by inhibiting the vibration occurring when a transfer unit transfers a receiving unit from being delivered to the receiving subject treatment unit. A stocker includes a shelf, a stacker crane, a housing(2), a first floor plate(8), an inspecting device(3), a second floor plate(9), and a plurality of supporting legs(6). The housing includes the shelf and the stacker crane and is loaded on the first floor plate. The inspecting device is loaded on the second floor plate. The first and second floor plates are consisted of a plurality of panels and are supported by the plurality of legs having a gap from each other. The stacker crane moves on a rail for transferring a cassette(10) and generates vibration. The generated vibration can be delivered to the inspecting device through the first floor plate, the supporting legs, the ground, and the second floor plate, but the vibration does not reach the second floor plate directly from the first floor plate to vibrate the inspecting device.
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