LINEAR MOTOR AND PRODUCTION METHOD THEREFOR AND STAGE DEVICE USING THIS LINEAR MOTOR

摘要

[MEANS FOR SOLVING PROBLEMS] A coil unit (60) comprises two rows of coils (66) integrated by mold (resin material) (76) and then covered with a cover member (78). A glass film (80) is formed on the surface of the mold (76). Being an inorganic material, the glass film (80) has an insulating property. A cooling water flowing path (74) is formed in the gap between the inner wall of the cover member (78) and the surface of the glass film (80). The glass film (80) is formed to a uniform thickness (several microns) by liquid glass coating.