| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To obtain synthetic quartz glass which has a radial distribution of fast axes of birefringence. <P>SOLUTION: The synthetic quartz glass has a diameter of 100 mm or more and is used in an optical apparatus comprising a light source emitting light having a wavelength of 250 nm or less. Further, the synthetic quartz glass has, in a region located inward from the periphery thereof by 10 mm or more in a plane perpendicular to the optical axis of the synthetic quartz glass: a birefringence of 0.5 nm or less per thickness of 1 cm with respect to a light having a wavelength of 193 nm; an OH group concentration of 60 ppm or less; an averaged differential OH group concentration from the center of the synthetic quartz glass toward a peripheral direction thereof, normalized with respect to the radius of the synthetic quartz glass, of not less than -60 ppm and less than -8 ppm; and a prescribed OH group concentration distribution. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
