PIEZOELECTRIC ACTUATOR OF INK-JET HEAD AND FORMING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric actuator of an ink-jet head capable of increasing response speed and connecting a drive circuit for voltage application strongly and stably.

SOLUTION: The piezoelectric actuator of the ink-jet head is formed at the upper section of a diaphragm 120, and provides driving force for discharging ink to a plurality of pressure chambers 131 each. The piezoelectric actuator comprises: a lower electrode 141 formed on the diaphragm 120; a piezoelectric film 142 formed at a position corresponding to each of the plurality of pressure chambers 131 on the lower electrode 141; a support pad 144 formed on the lower electrode 141 while the support pad 144 is in contact with one edge of the piezoelectric film 142; and an upper electrode 143 formed continuously while being extended from the upper surface of the piezoelectric film 142 to that of the support pad 144 on the upper surface of the piezoelectric film 142 and that of the support pad 144. At the upper section of the support pad 144, the upper electrode 143 is bonded to an FPC 150.

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