| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating device capable of restraining time in the adjustment work of a heating unit for delivering a substrate between the heating unit and the conveyance mechanism of the substrate precisely. SOLUTION: The coating device comprises: a liquid treatment unit for supplying a chemical liquid to the substrate for liquid treatment; a tower T composed by piling up a plurality of stages of heating units 41 for heat-treating the substrate before and after the liquid treatment by the liquid treatment unit; a conveying means for delivering the substrate between the heating unit 41 and the liquid treatment unit; and a support frame section 5 that composes the tower T, allows the heating unit 41 to be fitted for support, and is composed of a carbon fiber-reinforced composite material. The carbon fiber-reinforced composite material cannot be deformed by heat easily, thus preventing the support frame section 5 from being deformed by the heat of the heating unit 41 and restraining the deviation of the position of the heating unit 41. COPYRIGHT: (C)2007,JPO&INPIT
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