| 摘要 |
The present invention relates to a sensor module suitable for miniaturization and reduction in costs, in the radar sensor that uses a millimeter or sub-millimeter wave signal of which frequency is more than 20GHz. To accomplish this problem, the radar sensor is integrated into a one chip MMIC, in which an active circuit including an oscillator (4) and a mixer (12) is formed with an antenna on one semiconductor substrate. Further, the MMIC is sealed with a resin package (1). A dielectric lens (2) is formed on the resin package (1) over the antenna to attain a desired beamwidth. Thereby, the lens (2) and the resin package (1) can integrally be formed by a metal mold, thus reducing the cost. <IMAGE> |
