| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film magnetic head manufacturing method that sufficiently removes machining distortions without fail in machining processes while suppressing deformation of the thin film magnetic head. SOLUTION: The thin film magnetic head manufacturing method includes: cutting out a processing bar from a substrate with magnetic head elements formed thereon; applying coarse grinding to this processing bar for height processing; finely polishing it and applying a protective coat on the ends of the head at the ABS side to form a rail; and then cutting and separating the processing bar into sliders. The method applies annealing at a first temperature to the processing bar after the coarse grinding for height processing but before fine polishing, and another annealing at a second temperature after forming a protective coat but before forming a rail. Alternatively, it applies further annealing at a third temperature lower than the first temperature after applying annealing at the first temperature, and cutting and separating the bar into sliders. COPYRIGHT: (C)2007,JPO&INPIT
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