MAGNETOMETRIC SENSOR, ITS MANUFACTURING METHOD, ROTATION DETECTION DEVICE AND POSITION DETECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a one-chip constitution magnetometric sensor or the like capable of detecting an application magnetic field in the vertical direction and in the horizontal direction, adjusting detection sensitivity to the application direction of the magnetic field, and suppressing an influence on a magnetic-field sensitive characteristic under a condition wherein the magnetic field is applied from another direction different from the application direction, concerning the magnetometric sensor wherein an anisotropic magnetic resistance element is formed in a thin film shape on an IC substrate. SOLUTION: This magnetometric sensor stores in a package 66: a semiconductor substrate 67 equipped with an electric circuit having a comparison amplification function, in which magnetic resistance elements 11-14 are formed in a thin film shape on the substrate; a lead frame 60 for mounting the semiconductor substrate 67 thereon; and lead frames 61, 62 to be connected to the semiconductor substrate 67. The lead frame 60 has a structure wherein a semiconductor mounting surface is inclined with respect to the package surface by bending, and the semiconductor substrate 67 is mounted on the mounting surface. COPYRIGHT: (C)2007,JPO&INPIT