| 摘要 |
PROBLEM TO BE SOLVED: To enable a predetermined photoelectronic spectroscopic measurement even if a sample is inclined. SOLUTION: This electronic spectroscopic device is provided with a control unit 21 for operating a sample stage control unit 31, a lens stage control unit 32, a visual field restricting iris control unit 33, an angle restricting iris control unit 34 and a power supply unit 20 in connection with each other and a memory 35 for storing a position where an image forming lens 9 does not interfere with a sample stage 5 with respect to the angle of inclination of the sample stage 5, the opening diameter of a visual field restricting iris 16 to the position of the image forming lens 9, the opening diameter of an angle restricting iris 17, the applied voltage to an electrostatic lens 15 and the supply current to the image forming lens 9. The position of the image forming lens 9 corresponding to the angle of inclination of the sample stage 5 and the opening diameter of the visual field restricting iris 16, the opening diameter of the angle restricting iris 17, the applied voltage to the electrostatic lens 15 and the supply current value to the image forming lens 9 capable of performing predetermined analysis with respect to the position of the image forming lens 9 are called out of the memory 35 to operate the respective units in connection with each other. COPYRIGHT: (C)2007,JPO&INPIT
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