| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitive pressure sensor which improves sensor sensitivity, also improves airtightness within a cavity between a diaphragm and a fixed electrode, and has high reliability in an electrode part of an extraction electrode of the fixed electrode. SOLUTION: An electrode pad 16 covers the entire area of a protruded part 12b exposed on the principal surface 11a side of a glass substrate 11. In other words, the area of the electrode pad 16 is wider than that of the protruded part 12b exposed on the principal surface 11a side of the glass substrate 11. As a result, even when a silicon substrate 17 covering the electrode pad 16 is removed by dry etching, the protruded part 12b is prevented from being etched, since it is not exposed, thereby providing the electrode pad 16 with high reliability. COPYRIGHT: (C)2007,JPO&INPIT
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