| 摘要 |
An object of the present invention is to provide a fluid mixing system able to control the flow rates of different lines of fluid to mix them in any ratio, able to control the flow rate of even a pulsating fluid without problem, compact in configuration and able to be installed in a narrow space, and enabling easy pipe laying and pipe connection at the time of installation. In the system of the present invention, its feed lines 1, 2 are provided with fluid control valves 4, 10 changing the opening area of the channels to control the flow rates of the fluids, flow rate measuring devices 3, 9 measuring the actual flow rates of the fluids and converting the measured values of the actual flow rates to electrical signals for output, and control units 5, 11 outputting command signals for controlling the opening areas of the fluid control valve to the fluid control valves or equipment operating the fluid control valves based on the error between the measured values of the actual flow rate and the flow rate setting. In the system of the present invention, for example, to obtain a washing solution for semiconductor production, hydrofluoric acid or hydrochloric acid is mixed with pure water by a ratio of 1 part to 10 to 200 parts.
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