发明名称 WORKING FLUID SUPPLY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a working fluid supply device, using a working fluid filling up a container, and performing replacement work without suspending machining work in replacing with a new container filled with a working fluid. SOLUTION: The working fluid supply device for supplying a working fluid to a workpiece machined by a machining device includes: two working fluid containers; a first pump for delivering a working fluid stored in one of the two working fluid containers; a second pump for delivering a working fluid stored in the other working fluid container; a storage container for storing the working fluid delivered by the first pump and the second pump; a first water level detecting sensor, a second water level detecting sensor and a third water level detecting sensor which detect the water level of the working fluid stored in the storage container; and a control means. The control means stops the operation of one of the active first pump and the second pump when a detection signal is input from the third water level detecting sensor, or operates the other of the inactive first pump and the second pump. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007222963(A) 申请公布日期 2007.09.06
申请号 JP20060043958 申请日期 2006.02.21
申请人 DISCO ABRASIVE SYST LTD 发明人 ARAI MASARU;YOSHIDA MIKI
分类号 B24B57/02;B23Q11/10;H01L21/301 主分类号 B24B57/02
代理机构 代理人
主权项
地址