| 摘要 |
PROBLEM TO BE SOLVED: To provide a film-forming apparatus which forms a film onto a two-dimensional flat or three-dimensional curved surface of a paperboard, a plastic sheet, a paper container or a plastic bottle, made of paper or a plastic as a raw material, by using a plasma CVD method, more particular the film-forming apparatus forming a film with pressure in the range of 0.5-100 Pa. SOLUTION: The film-forming apparatus comprises a sub-chamber composed of a housing whereto a plurality of main-chambers are aligned. Where the total number of plastic containers stored inside the main-chambers, simultaneously form a thin film onto their inner faces by the plasma CVD method, and a component to regulate discharging velocity of generated gas from the containers, is equipped by installing it in the main-chamber or the sub-chamber. COPYRIGHT: (C)2007,JPO&INPIT
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