| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an MEMS (Micro Electro Mechanical System) device and a manufacturing method of an MEMS device, easily air-tight sealing an MEMS structure in a simple process. <P>SOLUTION: This MEMS device includes: an MEMS structure 30 including fixed parts 4a, 4b and a movable part 7 and formed on a semiconductor substrate 1; a wiring layer 8 in which wiring 16 connected to the MEMS structure 20 is stacked through an insulating film, which is formed to surround the MEMS structure 20; and a silicon nitride film 10 continuous from the upside of the wiring layer 8 to the upside of the MEMS structure 20 and having a plurality of opening parts 13, wherein a cavity part 14 is demarcated between the semiconductor substrate 1 and the silicon nitride film 10, and the opening parts 13 of the silicon nitride film 10 are blocked to air-tightly seal the interior of the cavity part 14. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
