SIMULATION SYSTEM, SIMULATION PROGRAM, AND SIMULATION METHOD

摘要

PROBLEM TO BE SOLVED: To calculate a percent defective for each fail mode using a distance measuring method. SOLUTION: The system comprises a first simulation executor 121 for calculating a shortest distance, until each wiring line forming the semiconductor memory device and a shortest distance for passage of each wiring line from coordinates on design layout data of a semiconductor memory device, each by a predetermined number; and also comprises a prediction analyzer 123 of each fail bit mode for calculating a yield for the semiconductor memory device from a criticality, and a probability of foreign matter having sizes of such shortest distances. COPYRIGHT: (C)2007,JPO&INPIT