| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect display picture plane for precisely presenting the features of a defect. SOLUTION: On a picture plane of thumbnail display for a defect, an image most saliently showing the features of a defect is determined/displayed for each of defects from inspection information, the kind of defect, etc. On a detailed display picture plane for a defect, images and displaying order of the images are determined/displayed for displaying so that the features of the defect are saliently shown based on the inspection information, the kind of defect, etc. Furthermore, a step is added to an imaging sequence in order to take an image for display with another defect image acquisition device or with other imaging conditions based on a previously named rule in a course of taking defect images or after taking defect images. COPYRIGHT: (C)2007,JPO&INPIT
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