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发明名称
A method of forming electrically isolated chips of semiconductor material
摘要
申请公布号
GB1119064(A)
申请公布日期
1968.07.03
申请号
GB19650037384
申请日期
1965.09.01
申请人
RADIO CORPORATION OF AMERICA
发明人
分类号
H01L21/762
主分类号
H01L21/762
代理机构
代理人
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