| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a system of adjusting manufacturing equipment which can suppress the variation in dimensions of manufactures. <P>SOLUTION: The system of adjusting manufacturing equipment comprises a measuring device 332 for measuring the dimensions of plural portions of a manufacture on a plane; an approximation module 121 for approximating a planar distribution of a plurality of dimensions by an orthogonal polynomial as a function of planar coordinates; a correlating module 123 for correlating a plurality of device parameters of manufacturing equipment 20 which has manufactured the manufacture with a plurality of terms of the orthogonal polynomial; and an adjustment module 352 for adjusting the plurality of correlated device parameters, so that each of a plurality of distribution components which constitute the planar distribution expressed by the orthogonal polynomial may be reduced. <P>COPYRIGHT: (C)2007,JPO&INPIT |
