PIEZOELECTRIC THIN-FILM DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent the effect of the contour of a piezoelectric thin film as much as possible in a piezoelectric thin-film device.

SOLUTION: In a piezoelectric thin-film filter 1 including four piezoelectric thin-film resonators R11-R14, the piezoelectric thin film 111 is supported by a base substrate 13. In the piezoelectric thin film 111, upper electrodes 1121-1124 and lower electrodes 1131-1132 that oppose each other in excitation regions E11-E14 are formed on both the surfaces. In the piezoelectric thin-film filter 1, the piezoelectric thin film 111 is spread over the entire surface of the base substrate 13, and the resonance characteristics of the piezoelectric thin-film resonators R11-R14 cannot be affected by the contour of the piezoelectric thin film 111 easily.

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