Kontaktor mit Kontaktelement auf der LSI-Schaltungsseite, Kontaktelement auf der Testplattinenseite zum Testen von Halbleitergeräten und Hestellungsverfahren dafür

摘要

A contactor (20) is placed between a semiconductor device (6) and a test board (8). A contact electrode (22) of the contactor electrically connects the semiconductor device to the test board. The contact electrode is formed of a conductive layer provided on an insulating substrate (24). The contact electrode comprises a first contact piece (22b1) which contacts a terminal (6a) of the semiconductor device, a second contact piece (22b2) which contacts an electrode (8a) of the test board, and a connecting portion (22a) which electrically connects the first contact piece and the second contact piece.