| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an immersion optical device capable of making immersion exposure in appropriate environments, to provide a cleaning method, and to provide an immersion exposure method. <P>SOLUTION: The immersion optical device includes a light source 20, an optical lens system 33, a stage 34 for moving a specimen stage for mounting a specimen, a liquid feeder 36 for supplying an immersion liquid or a cleaning liquid to between the optical lens system 33 and the specimen, a liquid recovery device 39 for recovering the liquid, and an ozone gas supply 42 connected with the stage 34 or the liquid feeder 36 for supplying ozone gas to the cleaning liquid. <P>COPYRIGHT: (C)2007,JPO&INPIT |
