| 摘要 |
PROBLEM TO BE SOLVED: To provide a grinding device which grinds a workpiece to a predetermined thickness even when a grinding wheel presses the workpiece held on a chuck table to tilt the chuck table. SOLUTION: The grinding device comprises: the chuck table equipped with a holding surface holding the workpiece and rotatably structured; a grinding unit equipped with the grinding wheel grinding the workpiece held on the chuck table; a first height position detecting means equipped with a first contacting element contacting with the holding surface of the chuck table. The grinding device comprises: a second height position detecting means equipped with a second contacting element contacting with a machining surface of the workpiece held on the chuck table; and a controlling means computing the thickness of the workpiece on the basis of detection signals from the first height position detecting means and the second height position detecting means. In this case, the first contacting element and the second contacting element are disposed to make a line connecting the first contacting element and the second contacting element parallel with a center axis of the tilting chuck table when the grinding wheel 42 contacts with the workpiece held on the chuck table 63. COPYRIGHT: (C)2007,JPO&INPIT
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