Polymerizable fluorinated ester, manufacturing method, polymer, photoresist composition and patterning process,申请号EP20050254298-传众专利搜索

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发明名称	Polymerizable fluorinated ester, manufacturing method, polymer, photoresist composition and patterning process
摘要
申请公布号	EP1616854(B1)	申请公布日期	2007.09.05
申请号	EP20050254298	申请日期	2005.07.08
申请人	SHIN-ETSU CHEMICAL CO., LTD.	发明人	KINSHO, TAKESHI;WATANABE, TAKERU;TACHIBANA, SEIICHIRO;HATAKEYAMA, JUN
分类号	C07C69/65;C07C69/653;C08F20/24;C08F20/26;G03F7/004;G03F7/039	主分类号	C07C69/65
代理机构		代理人
主权项
地址

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