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发明名称
LENSED FIBER ARRAY FOR SUB-MICRON OPTICAL LITHOGRAPHY PATTERNING
摘要
申请公布号
EP1828846(A2)
申请公布日期
2007.09.05
申请号
EP20050816999
申请日期
2005.11.04
申请人
3M INNOVATIVE PROPERTIES COMPANY
发明人
PORQUE, JEROME, C.
分类号
G03F7/20
主分类号
G03F7/20
代理机构
代理人
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