| 摘要 |
PROBLEM TO BE SOLVED: To highly accurately and quickly measure the amount of particles within a clean room. SOLUTION: This industrial robot 1 performs works such as assembling, machining and carrying in a clean space 11. A particle counter for measuring cleanness of the clean space 11 is provided in a hand part 10 of the industrial robot 1. COPYRIGHT: (C)2004,JPO |
