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发明名称
REACTOR DESIGN TO REDUCE PARTICLE DEPOSITION DURING EFFLUENT ABATEMENT PROCESS
摘要
申请公布号
EP1828680(A2)
申请公布日期
2007.09.05
申请号
EP20050820049
申请日期
2005.11.12
申请人
APPLIED MATERIALS, INC.
发明人
CHIU, HO-MAN, RODNEY;CLARK, DANIEL, O.;CRAWFORD, SHAUN, W.;JUNG, JAY, J.;TODD, LEONARD, B.;VERMEULEN, ROBBERT
分类号
F23G7/06;F23J9/00;F23M5/08
主分类号
F23G7/06
代理机构
代理人
主权项
地址
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