COATING FILM FORMING APPARATUS AND COATING UNIT CROSS-REFERENCE TO RELATED APPLICATIONS,申请号KR20000076709-传众专利搜索

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发明名称	COATING FILM FORMING APPARATUS AND COATING UNIT CROSS-REFERENCE TO RELATED APPLICATIONS
摘要
申请公布号	KR100755796(B1)	申请公布日期	2007.09.05
申请号	KR20000076709	申请日期	2000.12.14
申请人		发明人
分类号	H01L21/027;G03F7/16;H01L21/00	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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