APPARATUS FOR, AND METHOD OF, POSITIONING AN INTERFACE UNIT OF AN AUTOMATIC TEST SYSTEM

摘要

An apparatus and a method for positioning an interface unit of an automatic test system is provided to select a position of a semiconductor device to be tested to a probe or connection so that an electric signal is transmitted between a device to be tested and a test apparatus. A support device(106) supports an interface unit(102) removably attached to an attachment portion(124). A base(108) is connected to the support device. The base includes a rotational adjustment mechanism(110) moving the support device together with the interface unit about an axis of rotation, and a planar adjustment mechanism(114) moving the support device together with the interface unit within a plane orthogonal to the axis of rotation.