MEMS device and method of forming MEMS device,申请号EP20030029306-传众专利搜索

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发明名称	MEMS device and method of forming MEMS device
摘要
申请公布号	EP1484281(B1)	申请公布日期	2007.09.05
申请号	EP20030029306	申请日期	2003.12.18
申请人	HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.	发明人	NIKKEL, ERIC L.;SZEPESI, MICKEY;BENGALI, SADIQ;MONROE, MICHAEL G.;POTOCHNIK, STEPHEN J.
分类号	B81B3/00;B81C1/00;G02B26/08	主分类号	B81B3/00
代理机构		代理人
主权项
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