METHOD AND APPARATUS FOR SEPARATING A STAMPER FROM A PATTERNED SUBSTRATE

摘要

A method and an apparatus for separating a stamper from a patterned substrate are provided to reduce a manufacturing cost by using pressurized air to separate the stamper. A substrate having an upper surface and a lower surface is prepared, in which the upper surface has an imprintable resist layer(602). A support mechanism for retaining the substrate is prepared(604). A stamper having a formed pattern and contacting the upper surface of the substrate to transfer the formed pattern to the imprintable resist layer is provided, in which a chamber is formed within an opening of the substrate when the stamper contacts the substrate(606). A channel directed toward the chamber for introducing pressurized air into the chamber is provided(610). Pressurized air is introduced into the chamber through the channel to initiate separation of the stamper from the substrate(612).