Retainer ring structure for chemical-mechanical polishing machine,申请号KR20070013558U-传众专利搜索

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发明名称	Retainer ring structure for chemical-mechanical polishing machine
摘要
申请公布号	KR200443726(Y1)	申请公布日期	2007.09.05
申请号	KR20070013558U	申请日期	2007.08.16
申请人		发明人
分类号	H01L21/304;B24B37/32	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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