发明名称 TOPOTACTIC ANION EXCHANGE OXIDE FILMS AND METHOD OF PRODUCING THE SAME
摘要 <p>This invention disclosure describes methods for the fabrication of metal oxide films on surfaces by topotactic anion exchange, and laminate structures enabled by the method. A precursor metal-nonmetal film is deposited on the surface, and is subsequently oxidized via topotactic anion exchange to yield a topotactic metal-oxide product film. The structures include a metal-oxide layer(s) and/or a metal-nonmetal layer(s).</p>
申请公布号 EP1828444(A2) 申请公布日期 2007.09.05
申请号 EP20050851541 申请日期 2005.11.11
申请人 ZURBUCHEN, MARK A. 发明人 ZURBUCHEN, MARK A.
分类号 C30B25/10;C30B29/16;H01L21/00 主分类号 C30B25/10
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