| 摘要 |
An illumination optical system for illuminating a target surface using light from a light source includes a modified illumination generator for generating a modified illumination with a predetermined polarization state for the target surface, wherein the modified illumination generator includes a lambda/4 phase plate unit that includes a lambda/4 phase plate for converting a circularly polarized light into a linearly polarized light in a predetermined direction, and a diffractive optical element unit that is arranged in a substantially conjugate relationship with the target surface, and includes a diffractive optical element used for the lambda/4 phase plate to generate a predetermined illumination intensity distribution when the diffractive optical element unit receives the linearly polarized light.
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